Cleanroom Suite
Housed in the Institute for Biomedical Engineering, this facility offers a number of deposition techniques such as electron-gun evaporation and RF sputtering for establishing conductive, insulating and semiconducting films of thicknesses ranging from a few nanometers to micrometers, on any type of substrates. There is a chemical vapor deposition system optimsed for depositing biocompatible Parylene-C conformal films that are used for encapsulation purposes as well as flexible supports. Conventional optical lithography is also supported through an MA6/BA6 Suss aligner, which is combined with a nanoimprint lithography kit, achieving minimum features of a few tens of nanometers. The facility hosts an O2/Ar plasma chamber, a thermosonic wedge, ball and bump wire bonder and a Veeco Dektak stylus profiler. You can also access a laboratory dedicated to developing microfluidic devices.
The Cleanroom suite hosts the following equipment:
- Suss Microtec MA6/BA6 mask aligner and bond aligner
- Suss nano-imprint lithography kit
- BOC Edwards Auto 500 coating system (e-gun and sputtering combined)
- TPT HB16 thermosonic wedge, ball and bump wire bonder
- Veeco Dektak 6M stylus profiler stage
- Plasma chamber
- A high-end inspection microscope with colour CCD camera and metrology facilities
- A number of benches for handling acids, solvents and storing dry samples
DNA Electronics, an Imperial College spinout company, developed prototype components for their disposable genetic tests using the cleanroom suite facilities.
To access the Cleanroom Suite facility, please contact us.
