Housed in the Institute for Biomedical Engineering, this facility offers a number of deposition techniques such as electron-gun evaporation and RF sputtering for establishing conductive, insulating and semiconducting films of thicknesses ranging from a few nanometers to micrometers, on any type of substrates. There is a chemical vapor deposition system optimsed for depositing biocompatible Parylene-C conformal films that are used for encapsulation purposes as well as flexible supports. Conventional optical lithography is also supported through an MA6/BA6 Suss aligner, which is combined with a nanoimprint lithography kit, achieving minimum features of a few tens of nanometers. The facility hosts an O2/Ar plasma chamber, a thermosonic wedge, ball and bump wire bonder and a Veeco Dektak stylus profiler. You can also access a laboratory dedicated to developing microfluidic devices.
The Cleanroom suite hosts the following equipment:
DNA Electronics, an Imperial College spinout company, developed prototype components for their disposable genetic tests using the cleanroom suite facilities.
To access the Cleanroom Suite facility, please contact us.